JPS6438546U - - Google Patents
Info
- Publication number
- JPS6438546U JPS6438546U JP13420087U JP13420087U JPS6438546U JP S6438546 U JPS6438546 U JP S6438546U JP 13420087 U JP13420087 U JP 13420087U JP 13420087 U JP13420087 U JP 13420087U JP S6438546 U JPS6438546 U JP S6438546U
- Authority
- JP
- Japan
- Prior art keywords
- pressure
- recess
- semiconductor
- semiconductor substrate
- flexible portion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 8
- 239000000758 substrate Substances 0.000 claims description 4
- 238000001514 detection method Methods 0.000 claims 1
- 238000009792 diffusion process Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 229920005591 polysilicon Polymers 0.000 description 1
Landscapes
- Measuring Fluid Pressure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13420087U JPS6438546U (en]) | 1987-09-02 | 1987-09-02 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13420087U JPS6438546U (en]) | 1987-09-02 | 1987-09-02 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6438546U true JPS6438546U (en]) | 1989-03-08 |
Family
ID=31392741
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13420087U Pending JPS6438546U (en]) | 1987-09-02 | 1987-09-02 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6438546U (en]) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5654331A (en) * | 1979-09-21 | 1981-05-14 | Bosch Gmbh Robert | Volumetric pressure sensor |
| JPS57137831A (en) * | 1981-02-20 | 1982-08-25 | Nippon Soken Inc | Capacitive pressure detector |
-
1987
- 1987-09-02 JP JP13420087U patent/JPS6438546U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5654331A (en) * | 1979-09-21 | 1981-05-14 | Bosch Gmbh Robert | Volumetric pressure sensor |
| JPS57137831A (en) * | 1981-02-20 | 1982-08-25 | Nippon Soken Inc | Capacitive pressure detector |